Vacuum Atmosphere Rotary Furnace with Corrosion-Resistant Quartz Tube and HCl Gas Injection

Overview

This 1200℃ Vacuum Atmosphere Rotary Furnace is designed for stable, corrosion-resistant processing of sensitive materials under vacuum and controlled atmospheres. The furnace features a high-purity quartz glass tube with outer 316L stainless steel sealing, providing excellent chemical resistance to aggressive gases such as hydrogen chloride (HCl).

Key Features

• High-purity quartz glass furnace tube (φ280×264×5300mm) resists corrosion and contamination.
• Vacuum sealing structure with 316L stainless steel ensures airtight operation at -0.098MPa vacuum and 0.1MPa pressure resistance.
• Chlorine gas (HCl) injection system integrated via sealed inlet and outlet ports, suitable for sintering and chemical reaction processes.
• Electromagnetic feeding system with corrosion-proof quartz feed tubes and transition hopper lined with PTFE to prevent contamination.
• Three independent heating zones with silicon carbide heating elements (1600 type), totaling 60kW power, adjustable via PID + SCR automatic control.
• Water-cooled furnace body keeps surface temperature ≤ 50℃ for operator safety and equipment longevity.
• Servo motor driven furnace tube rotation adjustable from 0.5 to 5 rpm with continuous frequency control.
• Water jet vacuum pump system controlled by PLC enables precise atmosphere replacement and continuous feeding/discharging operations.

Technical Specifications

Advantages

• Superior corrosion resistance due to quartz glass tubes and sealed structure, extending equipment life.
• Minimal HCl leakage thanks to advanced vacuum sealing, lowering operational costs and environmental impact.
• Precise atmosphere and temperature control with integrated PLC and PID systems for optimized sintering processes.
• Continuous operation capability with electromagnetic feeding and automatic atmosphere displacement.
• Operator-friendly design with low surface temperature and automated controls ensuring safety and ease of use.